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采用外部电极电容耦合的等离子体聚合装置,以Ar、N_2H_2和Hc为等离子气体,在不同功率、压力、等离子气体及等离子气体对单体比率的反应条件下,在辉光放电中进行八氟环丁烷聚合。用电子能谱(ESCA)和红外光谱(IR)法对聚合物结构进行表征。发现聚合物中存在C、F、Si、O、N和H等六种元素,并对可能存在的基团进行探讨。通过对ESCA(C_18 谱的分析,研究了聚合物支化与交联程度对反应条件的依赖关系,及其和聚合与刻蚀竞争历程之间存在的内在联系。
An external electrode capacitively coupled plasma polymerization apparatus was used to conduct an octafluorocyclohexane ring in a glow discharge under the reaction conditions of different power, pressure, plasma gas and plasma gas to monomer ratio using Ar, N 2 H 2 and Hc as plasma gases Butane polymerization. The polymer structure was characterized by electron spectroscopy (ESCA) and infrared spectroscopy (IR). It is found that there are six elements C, F, Si, O, N and H in the polymer, and the possible groups are discussed. Through the analysis of ESCA (C_18) spectrum, the dependence of the degree of branching and cross-linking of polymer on the reaction conditions was studied, and the interrelationship between the polymerization and etching competition history was studied.