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1.引言最初的氦质谱检漏仪的专利大约始于40年前,那时,还没有能够达到所需要的灵敏度的技术。人们一直认为检测很微小的漏孔是氦检漏的主要用途。浸水检验,卤素检漏仪和着色渗透仍然是工业上的传统方法。这时,大部分待检的漏孔为10~(-3)～10~(-6)毫巴·升/秒。近10年来,采用更可靠、更便宜的电子元件的真空技术的发展,已允许氦检漏仪在工业应用
1. INTRODUCTION The original patent for a helium mass spectrometer leak started approximately 40 years ago when there was not enough technology to achieve the required sensitivity. People have always believed that the detection of tiny leaks is the main use of helium leak detection. Water immersion testing, halogen leak detectors and color penetration are still the traditional methods in the industry. At this time, most of the leaks to be detected 10 ~ (-3) ~ 10 ~ (-6) mbar · L / s. The development of vacuum technology using more reliable, cheaper electronic components in the last 10 years has allowed the use of helium leak detectors in industrial applications