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一、概述离子敏场效应管(简称ISFET)以及在此基础上发展起来的生物敏场效应管(简称生物敏FET)由于具有超小型、高速响应、易实现多功能化和集成化等特点,是当前一类极有前途、富有生命力的器件。一般来说,ISFET都是用普通的硅材料来制作的。近几年来,国际上报道了用新型的“兰宝石上外延硅”(Silicon—On—Sapphire,简称为SOS)材料来制作ISFET。SOS—ISFET与普通的Si—ISFET相比,有如下优点:
I. Overview Ion sensitive field effect transistor (referred to as ISFET) and on the basis of this developed bio-sensitive field effect transistor (biosensitive FET) due to the ultra-small, high-speed response, easy to realize multi-functional and integrated features, It is a kind of very promising and vitality device at present. In general, ISFETs are made from common silicon materials. In recent years, it has been reported that a new type of “Silicon-On-Sapphire” (SOS) material is used to fabricate ISFETs. Compared with ordinary Si-ISFET, SOS-ISFET has the following advantages: