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超精密加工是发展现代高科技和精密机械必不可少的一种机械制造新工艺,也意味着一个时代最高精密等级的加工。目前的超精密加工一般指达到绝对加工精度为0.1μm或表面粗糙度为Ra0.01μm以及达到加工允差和加工尺寸之比为10~(-6)的加工技术。超精密加工最关键的问题是切除接近工程材料的原子、分子尺寸的极微薄材料层。要实现超精密加工,除了应具有适应这种工艺特点的机床、刀具、工件材料、测量技术之外,还要具备要求十分严格的环境条件。
Ultra-precision machining is essential for the development of modern high-tech and precision machinery a new mechanical manufacturing process, but also means that the era of the highest precision machining. The current ultra-precision machining generally refers to the processing technology to achieve the absolute machining accuracy of 0.1μm or surface roughness of Ra0.01μm and to achieve the processing tolerance and processing size ratio of 10 -6. The most critical issue in ultra-precision machining is the removal of very thin material layers close to the atomic and molecular dimensions of the engineered materials. To achieve ultra-precision machining, in addition to have to adapt to the characteristics of this process of machine tools, cutting tools, workpiece materials, measurement techniques, but also have the requirements of very strict environmental conditions.