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本文介绍了对电子束曝光机偏转象差进行全面校正时标记采样结点,包括电子束斑形状和标记位置的检测方法。推导了通过测量四个方向上的束斑“直径”便可计算束斑形状的椭圆参数公式,从而使得对偏转散焦进行精确校正成为可能,这在以往的文献中不多见。论述了测量标记采样结点数据与确立偏转象差校正方程的关系。
In this paper, we introduce the method of detecting the sampling point of the beam, including the shape of the electron beam spot and the position of the mark, when correcting the deflection aberration of electron beam lithography machine. It is deduced that the ellipse parameter formula of the beam spot shape can be calculated by measuring the “diameter” of the beam spot in the four directions, which makes it possible to accurately correct the deflection defocus, which is rare in the past literature. The relationship between the data of sampling points of calibration marks and the correction equation of deflection aberration was discussed.