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单晶硅压阻式固态压力传感器是当前航空测试工作中急需的器件。多年来,不少厂所、院校做了大量的研制工作,产品性能有所提高。目前迫切需要进一步提高温漂等性能指标和小型化、系列化。北京航空学院微电子器件实验室研制的,直径为3毫米的GGY-Z3型微型固态压力传感器,经有关单位试用后,已于1982年初,由三机部主持的鉴定会对该产品进行了技术鉴定,现已进行小批量生产。微型固态压力传感器的研制工作仅仅是开始,还有不少技术上的问题需要进一步解决。欢迎展开交流和讨论。
Monolithic piezoresistive solid-state pressure sensor is the urgent need for aviation test equipment. Over the years, many factories, colleges and universities have done a lot of research and development, product performance has improved. There is an urgent need to further improve the temperature drift and other performance indicators and miniaturization, serialization. Beijing Institute of Aeronautical Microelectronics Laboratory developed a diameter of 3 mm GGY-Z3-type miniature solid-state pressure sensor, after the trial by the relevant units, in early 1982, the Ministry of the Ministry presided over the identification of the technology carried out on the product Identification, has now been small batch production. Development of miniature solid-state pressure sensor is just the beginning, there are many technical problems need to be further resolved. Welcome to exchange and discuss.