New Bi-metallic Single Source Precursors for the Deposition of Thin Films of Semiconductor Ceramics

• 作 者: U. Salma M. Mazhar J.I. Akhter
• 机 构: Department of Chemistry,Physics Division
• 出 处: 材料科学技术学报（英文版）
• 发表日期: 2004年期
• 关键词: Single source precursors CCCVD Organotin carboxylates
• 基金项目: The authors acknowledge MoST, Goverment of Pakistan for the financial;the British Council, Islamabad Pakistan for Charles Wallace Trust Award

Stable binary single source precursors (SSP) for the deposition of thin films of ceramic semiconductors of composition SnO·GeO were synthesized by close circuit chemical vapour deposition (CCCVD) method. Elemental analysis and spectroscopic techniques were used to characterize the precursors. Scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) were employed to characterize the thin films. Resistivity measurements were conducted to show that the films are of semiconducting nature.