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Scanning Probe Microscopy (SPM) opened the nanotechnology era.Scanning Tunneling Microscopy (STM), the first member of SPM, could not only visualize the world of atoms but also manipulate them.The major limitation of STM-the sample must be electrically conductive-was overcome by the invention of Atomic Force Microscopy (AFM).The micro-machined mechanical probe was used to measure the inter-atomic force between sample surface and the probe and was subsequently utilized as the proximal detector of various physical properties of the sample surface.The family members of SPM grew rapidly and its application base expanded to image, characterize, and modify the surface of a sample in nanometer scale.