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Scanning microwave microscopy (SMM) is a recent development in SPM technique that combines an AFM with a vector network analyzer (VAN).In the reflection mode (S 11 measurement), the measured complex reflection coefficient of the microwave from the contact point directly correlates to the impedance of the sample under test, and it is capable of measuring minute capacitance difference (~10-18F) between materials and different regions on the sample surface, such as that between decanethiol and octadecanthiol SAM layers.SMM can also be used for doping structure characterization of semiconductor devices.