Effect of Treatment Process on PMN-PT Thin Films

来源 :The 5th International Congress on Ceramics, ICC5(第五届国际陶瓷大会) | 被引量 : 0次 | 上传用户：f11034

【摘要】

：

　　PMN-PT 68-32 Ferroelectric thin films have been successfully prepared on Pt/Ti/SiO2/Si(100)substrate by sol-gel process.The effect of different process cond

【作者】

：

AopeiWANG;WenWANG;

【机构】

：

Material Science and Engineering,HIT,Harbin,Chin

【出处】

：

The 5th International Congress on Ceramics, ICC5(第五届国际陶瓷大会)

【发表日期】

：

2014年期

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　　PMN-PT 68-32 Ferroelectric thin films have been successfully prepared on Pt/Ti/SiO2/Si(100)substrate by sol-gel process.The effect of different process conditions including lead content and annealing progress on PMN-PT films has been discussed.Pyrochlore phase has been eliminated by controlling conditions.X-ray diffraction results showed the compose of PMN-PT thin films was perovskite phase with(111)orientation in proper annealing process.SEM micrographs showed the surface of the films was smooth and consisted of intensive grains without visible flaw.The prepared films revealed ferroelectric properties well.

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