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We propose a modified genetic algorithm,which has combined adaptive genetic algorithm with non-linear least squares method.The modified algorithm is applied in the data processing of ellipsometric analysis,which can search the global optimal solution in a large scale fast[1].We design the ellipsometry inversion calculation programs,which is written in MATLAB with the modified algorithm to process the ellipsometry data detected by SC620 Ellipsometer in the spectral range of 400nm – 900nm.The evaluating function equation is improved according to the photometry principle of SC620 Ellipsometer[2],and calculations are made with the proper genetic parameters.