【摘 要】
：
To achieve high quality optical aspheric silicon carbide mirror,the surface of silicon carbide mirror should be modified firstly.In order to polish silicon
【出 处】
：
2014年光子与光学工程国际会议暨西部光子学学术会议
论文部分内容阅读
To achieve high quality optical aspheric silicon carbide mirror,the surface of silicon carbide mirror should be modified firstly.In order to polish silicon modification layer on aspheric silicon carbide mirror surface effectively,a combined polishing technology,including computer-controlled optical surfacing,chemical mechanical polishing and ion beam figuring,is presented.Computer-controlled optical surfacing technology is used to improve figure accuracy and reduce the value of surface roughness of silicon modification layer on aspheric silicon carbide mirror surface in a way.To reduce the value of surface roughness of silicon modification layer further,silicon modification layer on aspheric silicon carbide mirror surface is polished by means of chemical mechanical polishing technology.Ion beam figuring technology is applied to get high figure accuracy of silicon modification layer on aspheric silicon carbide mirror surface.The 600mm?00mm surface modification silicon carbide mirror is polished by the combined polishing technology.After computer-controlled optical surfacing,the figure and roughness of the mirror are 0.046λ RMS(λ=0.6328μm)and 1.64nm(RMS),respectively.After flexible chemical mechanical polishing and ion beam figuring,the figure and roughness of the space mirror are0.014λ RMS(λ=0.6328μm)and 0.71nm(RMS),respectively.
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