Plasma etching of large-size silicon based microchannel plates

来源 :2016年第二届光子学与光学工程国际会议暨第八届西部光子学会议 | 被引量 : 0次 | 上传用户:haisen888
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  Microchannel plate(MCP)which is assembled from millions of single-channel electron multiplier(CEM)is the key component of the image intensifier.Because they have the advantages of high gain,low noise,high resolution,low power consumption,wide bandwidth,long life and self-saturation effects etching,MCP is widely used in military science,space science,nuclear radiation detection,spectroscopy science and materials testing,analytical instruments and other fields.
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