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  5. Method and verification for measuring surface roughness of components by angle resolved scattering m

Method and verification for measuring surface roughness of components by angle resolved scattering m

来源 :2016年第二届光子学与光学工程国际会议暨第八届西部光子学会议 | 被引量 : 0次 | 上传用户：hbjysd520
【摘 要】
：
This paper introduces the automatic measurement system of laser scattering method based on angular resolution.Discuss the principle of laser in optical element surface scattering,propose the method wh
【作 者】
：
C.Wang 
【机 构】
：
Changchun University of Science and Technology China
【出 处】
：
2016年第二届光子学与光学工程国际会议暨第八届西部光子学会议
【发表日期】
：
2016年5期
【关键词】
：
Angle resolved scattering Bidirectional reflectance distribution function Experi 
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　　This paper introduces the automatic measurement system of laser scattering method based on angular resolution.Discuss the principle of laser in optical element surface scattering,propose the method which use angle resolved scattering(ARS)method to measure surface roughness,at the same time the measurement principle experimental platform is built based on the experimental results after verifying the correctness of the angle resolved scattering method.
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