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  5. Study on the Development of Porous Materials Used in Aerostatic Platform

Study on the Development of Porous Materials Used in Aerostatic Platform

来源 :第七届亚澳复合材料会议 | 被引量 : 0次 | 上传用户：zxcvzo1
【摘 要】
：
The porous ceramic material can reduce the air flow, but also can achieve uniform air pressure, good distribution, and can provide sufficient float height and adsorption force required by work, and ha
【作 者】
：
C.S.Lin C.C.Chang W.T.Chen F.M.Chen 
【机 构】
：
General Manager,Stone & Resource Industry R&D Center,Hualien,Taiwan
【出 处】
：
第七届亚澳复合材料会议
【发表日期】
：
2010年4期
【关键词】
：
Restrictors Porous Ceramic Air Bearing Aerostatic Platform Composite 
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　　The porous ceramic material can reduce the air flow, but also can achieve uniform air pressure, good distribution, and can provide sufficient float height and adsorption force required by work, and has been gradually applied to the conveying & precision positioning system for large-size TFT-LCD glass substrate and relevant process equipment.Therefore, this study discussed the above problems from reference and theoretical analysis, characteristics of porous ceramic, design and development of aerostatic platform and related technology application and so on.
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