Interactions between dimethylaluminum isopropoxide molecules and their effect on dimethylaluminum is

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：firefly0808

【摘要】

：

An alumina thin-film has recently been actively studied in solar cell sector to utilize its negative fixed charge to suppress the recombination rate of minority charge carriers as passivation layers.

【作者】

：

Dae-Hee Kim Yeong-Cheol Kim

【机构】

：

School of Energy, Materials & Chemical Engineering, Korea University of Technology and Education,180

【出处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

Atomic layer deposition Dimethylaluminum isopropoxide Alumina Density functional

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An alumina thin-film has recently been actively studied in solar cell sector to utilize its negative fixed charge to suppress the recombination rate of minority charge carriers as passivation layers.

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Interactions between dimethylaluminum isopropoxide molecules and their effect on dimethylaluminum is

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