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In this study,the internal vacuum camera (IVC) which can be used at low and high vacuum regions was manufactured.
Real time monitoring of vacuum system using an internal vacuum camera (IVC)
【摘 要】
：
In this study,the internal vacuum camera (IVC) which can be used at low and high vacuum regions was manufactured.
【机 构】
：
Department of Materials Science and Engineering and Plasma Materials Research Center,Kunsan National
【出 处】
：
2011年第三届微电子及等离子体技术国际会议
【发表日期】
：
2011年9期
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