【摘 要】
：
CrAlSiN hard coatings are fabricated on the Si substrate from metallurgical Cr0.45Al0.45Si0.10 alloy target by reactive r.f.magnetron sputtering.The oxidation resistance of CrAlSiN coatings is investi
【机 构】
：
National Tsing Hua University,Department of Materials Science and Engineering,Hsinchu,Taiwan
【出 处】
：
Fifth International Conference on Surface Engineering(第五届表面工
论文部分内容阅读
CrAlSiN hard coatings are fabricated on the Si substrate from metallurgical Cr0.45Al0.45Si0.10 alloy target by reactive r.f.magnetron sputtering.The oxidation resistance of CrAlSiN coatings is investigated after annealing at temperatures between 900 and 1100 ℃ for 1 hr in air.The phase identification,depth profile,and microstructure of CrAlSiN coatings after heat treatment are analyzed by X-ray diffraction (XRD),Auger electron spectrometer (AES),respectively.The hardness of CrAlSiN coating after heat treatment at 900oC for 1hr in air is slightly decreased from 30.2 GPa to 28.3±1.3 GPa,which was caused by the thin oxide formation on the surface of the film.The microstructure of CrAlSiN coating after heat treatment at 1000 ℃ from 1 hr analyzed by TEM and AES can be revealed into two types of layer feature,including the nanocrystalline grain embedded in the Al-riched amorphous layer and reaction interface with relative high content of Si as shown in Fig.1.Besides,the detailed microstructure of CrAlSiN after 1100 ℃ for 1 hr is also discussed.It is concluded that the CrAlSiN exhibits excellent oxidation resistance at elevated temperatures in air environment.
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