【摘 要】
：
The Scanning probe microscopes(SPMs)are widely used in nanoscience research and industry because of the ability of surface topography measurement with nanom
【机 构】
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National Institute of Metrology,China
【出 处】
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The 6th International Conference on Nanoscience and Technolo
论文部分内容阅读
The Scanning probe microscopes(SPMs)are widely used in nanoscience research and industry because of the ability of surface topography measurement with nanometer resolution.To ensure the quantity consistency,metrological instruments are developed to calibrate the standard artifacts.For nanometrology,a large range metrological atomic force microscope(AFM)has been designed and constructed in national institute of metrology,which serves as national standard device of china[1,2,3].
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