【摘 要】
：
The FIB system utilizes ions (gallium, normally) produced by a liquid-metal source to scan over a sample surface and sputter away bulk material.It has been extensively utilized for specimen preparatio
【机 构】
：
College of Information Science and Engineering,Northeastern University,Shenyang 110004,China
【出 处】
：
International Conference on Nanoscience & Technology,China 2
论文部分内容阅读
The FIB system utilizes ions (gallium, normally) produced by a liquid-metal source to scan over a sample surface and sputter away bulk material.It has been extensively utilized for specimen preparation for a wide range of analytical techniques owning to its capability of high spatial resolution imaging, milling, and deposition.The collision between ions and atoms results in surface alteration of different levels which are mainly impacted by ion beam variables, such as overlap, dwell time, dosage and so on.Therefore, FIB can be expected to fabricate sharp features and achieve high resolutions by precisely controlling the beam variables and obtaining optimized conditions.In addition, with negligible forwardscattering and backscattering produced, a fine defined ion beam is capable of fabricating narrow line widths and structures at the nanoscale with high aspect ratio and accuracy, enabling fascinating photonie devices with various functions and applications.
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