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We deposited various CIGS samples by using in-line sputter to confirm the mass production ability of the sputtering equipments.
Crystal structure analysis of in-line sputtered CIGS solar cell absorber
【摘 要】
：
We deposited various CIGS samples by using in-line sputter to confirm the mass production ability of the sputtering equipments.
【机 构】
：
Department of Green Energy Research, Gumi Electronics & Information Technology Research Institute,Bo
【出 处】
：
2011年第三届微电子及等离子体技术国际会议
【发表日期】
：
2011年9期
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