Nanostructured FePt-X (001) films with high-aspect ratio grains and large coercivity on TiON interme

来源 :The 4th Conference on Nanomaterials(cn2015)2015年第四届纳米材料学术研讨会 | 被引量 : 0次 | 上传用户:ttttt2046
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  The main challenge of the application of L10FePt thin films as magnetic recording media is the simultaneous fabrication of FePt (001) thin films with high perpendicular anisotropy and small grain size.L10FePt (001) granular films with grain size of 5-6 nm were achieved on MgOunderlayer by doping C and Ag.1-3 However,RF sputtering of the insulating MgOunderlayer layer is not preferred for industrial applications due to its low deposition rate and particle contamination on the media surface.
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