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CeO2-based polishing powder has become one of the most promising polishing powders used in chemical mechanical polishing(CMP)industry.However,due to its high hardness,the as-obtained CeO2 powders usually need further modifications,especially when polishing soft materials,such as fused quartz-based optical glass.In this work,we reported a novel fluorine doping strategy for the synthesis of CeO2 powders with controllable morphologies and improved CMP properties.