The formation process of silicon-nanocrystals (Si-NCs) in the amorphous silicon/silicon dioxide (a-Si/SiO2) multilayer s......

在单晶Si(100)基体上利用电子回旋共振等离子体增强化学气相沉积法制备硅薄膜,并采用X射线衍射谱(XRD)、透射电镜(TEM)、Raman光谱......