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本文分析了微型齿轮测量的技术难点,提出了齿轮测量的切向对正技术及开环驱动阶段误差补偿的控制方法,介绍了微型齿轮量仪的测头制造技术及量仪坐标系的建立。
In this paper, the technical difficulties of micro-gear measurement are analyzed, the tangential alignment technology of gear measurement and the control method of error compensation in open-loop drive stage are proposed. The manufacturing technology of probe of micro-gear meter and the establishment of measuring coordinate system are introduced.