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本文研究了磁光材料保护膜ＡＩＮ和ＡＩＳｉＮ薄膜材料，讨论了它们的性能与溅射工艺参数的关系，研究了ＡＩＮ及ＡｌＳｉＮ薄膜对磁光盘材料的保护作用，研究同时表明：ＡＩＮ及ＡｌＳｉＮ保护膜能对磁光材料起干涉增强磁光克尔效应作用。
AIN and AISiN thin film materials are studied in this paper. The relationship between their performance and sputtering process parameters is discussed. The protective effect of AIN and AlSiN thin films on the magneto-optical material is also studied. At the same time, the protective films AIN and AlSiN Can interfere with the magneto-optical material to enhance the role of magneto-optical Kerr effect.