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用多模干涉原理分析和设计了光通信波长(1.30μm~1.55μm)的Si1-xGex/Si滤波器,并用模的传播分析方法对其传输特性进行了研究。结果发现,在Ge含量x=0.04时,干涉区的脊高和宽度分别为6.35μm和8μm。如果多模干涉区长度LM=2302.5μm,可滤1.30μm而通1.55μm的波长。且具有31dB的对比度和0.01dB的插入损耗;如果多模干涉区长度LM=2512.5μm,可滤1.55μm而通1.30μm的波长。具有16dB的对比度和0.09dB的插入损耗。
The Si1-xGex / Si filter with optical communication wavelength (1.30μm ~ 1.55μm) was analyzed and designed by using the principle of multimode interference. The transmission characteristics of the Si1-xGex / Si filter were studied by the mode propagation analysis method. The results show that the ridge height and width of the interference region are 6.35μm and 8μm at the Ge content of x = 0.04. If the length of the multimode interference zone is LM = 2302.5μm, a wavelength of 1.30μm and 1.55μm can be filtered. And has a contrast of 31 dB and an insertion loss of 0.01 dB; if the length of the multimode interference region is LM = 2512.5 μm, a wavelength of 1.55 μm can be filtered while passing through 1.30 μm. With 16dB contrast and 0.09dB insertion loss.