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本文采用Ｘ射线衍射和阴极射线发光技术对溅射法生长的ＺｎＳ∶Ｔｂ，Ｆ薄膜的发光光谱和薄膜的微观结构进行了研究，得出了激晶薄膜的晶粒尺寸与发光强度的关系．讨论了稀土离子的价态对掺杂稀土微晶薄膜的发光性质与晶粒尺寸的关系的影响．
In this paper, the X-ray diffraction and cathodoluminescence techniques were used to study the luminescence spectra and the microstructure of thin films grown by sputtering. The relationship between the grain size and the luminescence intensity of the thin films was obtained. The effect of valence of rare earth ions on the relationship between the luminescent properties and the grain size of rare earth doped microcrystalline thin films was discussed.