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一、前言集成电子学十多年的迅速发展对现代社会各领域已产生深远的影响。以微型计算机为基础的测量控制系统的出现及其在各个领域中的广泛应用的同时,也促进了集成化传感器的飞跃发展。多年来,国内外都集中了较大精力将硅集成电路技术应用于传感器的设计与制造。集成压阻式压力传感器是目前航空测试技术中较为先进的一种传感器。其优越性不
I. INTRODUCTION The rapid development of integrated electronics for over a decade has had a profound impact on all fields of modern society. The emergence of microcomputer-based measurement control systems and their widespread use in various fields have also contributed to the leapfrog development of integrated sensors. Over the years, both at home and abroad have concentrated their efforts to the silicon integrated circuit technology used in the design and manufacture of sensors. Integrated piezoresistive pressure sensor is a more advanced aerospace testing technology in a sensor. Its superiority is not