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a-Si、CdTe和CIGS是目前薄膜呔阳能电池主流技术，而大部分CIGS（铜铟镓硒）电池都采用真空蒸镀方式生产——称为共蒸镀（co-evaporation），将主要材料铜铟镓与硒加热在真空中沉积于基板，这种工艺要实现大面积且均匀的铜铟镓硒膜具有相当的挑战性。
CIGS将进入快速增长期
【摘 要】
：
a-Si、CdTe和CIGS是目前薄膜呔阳能电池主流技术，而大部分CIGS（铜铟镓硒）电池都采用真空蒸镀方式生产——称为共蒸镀（co-evaporation），将主要材料铜铟镓与硒加热在真空中沉积于基板
【出 处】
：
集成电路应用
【发表日期】
：
2009年10期
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