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本文在扼要介绍各种干法腐蚀工艺之后,重点报导研制的反应离子腐蚀实验装置的构成以及在该装置上进行腐蚀铝的实验情况,并对装置上的质谱分析系统进行简单的说明。
After briefly introducing various dry etching processes, this paper mainly reports on the composition of the experimental apparatus for reactive ion etching and the experimental situation of the corrosion of aluminum on the apparatus, and gives a brief description of the mass spectrometry system on the apparatus.