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作为电子束曝光机的激光定位精密工件台的位置测量和控制电路。本电路将电子束曝光机的大脑——电子计算机与工件台连接起来。而且由于计算机容量有限,对工件台的控制工作很多都要由本电路完成。总的来说,它可完成四种功能:1、平面座标系上的位置测量,为计算机随时提供工件台的准确位置代码;2、根据拼接图形的要求。将工件台平稳地停在预定座标位置上;3、在工
As the electron beam exposure machine laser positioning precision workpiece stage position measurement and control circuit. This circuit connects the brain-computer of the electron beam lithography machine with the workpiece stage. And due to the limited computer capacity, the control of the workpiece stage a lot to be completed by the circuit. In general, it can perform four functions: 1, the position measurement on the plane coordinate system, for the computer at any time to provide the exact location of the workpiece code; 2, according to the requirements of stitching graphics. The workpiece stage parked in a predetermined coordinate position; 3, in the work