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利用物理热蒸发法,控制蒸发温度、载流气流量,氧气流量等工艺参数制备SnO2纳米材料。经SEM分析,得到的纳米SnO2形貌分别呈现为团絮状、片条状、细长线状的特征。将其作为基料制成旁热式气敏元件,对C2H5OH蒸汽进行气敏特性测试。结果表明:纳米SnO2的形貌对C2H5OH蒸汽的灵敏特性影响显著,其中形貌为细长线状的灵敏度最高,片条状的次之,团絮状的最低;灵敏度随着无水乙醇蒸汽浓度的增大呈现“∧”型变化;随着测试工作温度的升高气敏度也呈现“∧”型变化趋势。
The physical thermal evaporation method is used to control the temperature of the evaporation, the carrier gas flow rate and the oxygen flow rate to prepare the SnO2 nanometer material. After SEM analysis, the obtained nano-SnO2 morphology showed flocculent, lamellar, slender linear features. As a base material made of next-thermal gas sensors, C2H5OH steam gas sensitivity testing. The results showed that the morphology of nano-SnO2 had a significant effect on the sensitivity of C2H5OH steam. The morphology of slender wire had the highest sensitivity, the stripe shape followed by the lowest floc. The sensitivity of ethanol- Increased “” ∧ “type change; with the increase of test temperature gas sensitivity also showed ” ∧ "type of change.