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本文介绍了美国霍尼韦尔公司SSED的基本情况;介绍了扩散硅力敏传感器Class41型的基本参数和制备工艺;还介绍了智能传感器ST3000的制备工艺及在设计、性能方面与Class41型传感器的比较;由此提出对发展我国扩散硅力敏传感器的看法。
This paper introduces the basic situation of American Honeywell SSED. Introduces the basic parameters and preparation technology of diffusive silicon force sensor Class41; also introduces the preparation process of smart sensor ST3000 and the design, performance and Class41 sensor Compared to; thus proposed to develop our country diffusion silicon force sensitive sensor’s opinion.