论文部分内容阅读
罗茨真空泵在真空10～10~(-3)乇压强內有巨大而平稳的抽气速率,所以近年來发展甚快页壬穆薮谋糜?ZL-10(600升/秒)、ZL-8(150升/秒)和2ZL-6(30升╱秒)等。为提高泵的容积效率、进排气压縮比和减少气体的反流,罗茨真空泵都和前級机械真空泵串联使用。因此我厂罗茨真空泵采用H-S、BH_4、2X-5、2X-3、2X-2等前級机械泵配套。这些泵,我們都經过性能测試和数百小时的試运轉。玆将試驗方法、設备、要求、經过情况和初步試驗
Roots vacuum pump in the vacuum pressure of 10 ~ 10-3 (-3) Torr has a huge and smooth pumping rate, so the rapid development in recent years page Ren Mu 薮 Mi Mi? ZL-10 (600 liters / second ), ZL-8 (150 L / s) and 2ZL-6 (30 L / s). In order to improve the pump volumetric efficiency, intake and exhaust compression ratio and reduce the gas reflux, Roots vacuum pumps are used in series with the former mechanical vacuum pump. Therefore, our factory Roots vacuum pump with H-S, BH_4, 2X-5, 2X-3, 2X-2 and other former mechanical pump package. We’ve all got performance tests and hundreds of hours of commissioning for these pumps. The test methods, equipment, requirements, after the situation and the initial test