Study on sputtering Zn(O,S)buffer layers for eco-friendly Cu(In,Ga)Se2 solar cells

• 作 者: 史思涵 范玉 何志超 周志强 刘芳芳 张毅 汤安东 孙云 刘
• 机 构: TianjinKeyLaboratoryofThinFilmDevicesandTechnology,HanergyHeyuanMobileEnergyIntelligenceManufactureB
• 出 处: 光电子快报:英文版
• 发表日期: 2019年6期
• 关键词: FILMS SPUTTERING INTERFACE
• 基金项目: the National Natural Science Foundation of China(Nos.61774089,51572132 and 61504067),the Yang Fan Innovative&Entrepreneurial Research Team Project(No.2014YT02N037).

An eco-friendly Zn(O,S) film with a wider band gap is emerging as one of the promising Cd-free replacement material,which can be deposited by radio frequency sputtering.The effect of sputtering pressure on the Zn(O,S) films properties and the devices perf