SPUTTERING相关论文
Unraveling the surface chemistry processes in lithiated and boronized plasma material interfaces und
The review of recent theoretical and experimental research on the complex surface chemistry processes that evolve from l......
CrN coated steels assisted with a nano Cr interlayer were investigated. The Cr nano-interlayers were prepared by sputter......
In order to achieve low cost high efficiency thin film solar cells,a novel Semiconductor Photovoltaic (PV) active mat......
用XPS方法研究了Ag-Pd合金在氩离子轰击下表面组成的变化。结果表明,由于Ag-Pd表面原子间结合能不同,合金在热退火后表面富Ag,经氩......
A two-step process of Ni silicide formed on bulk silicon,and the effects of different process conditions,including two-s......
ZnO films and ZnO:Cu diluted magnetic semiconductor films were prepared by radio frequency magnetron sputtering on Si(11......
Tantalum and copper layers were deposited on a thermally oxidized Si substrate in a magnetron sputtering process.Nanoind......
ZnO films, doped with 2.9 atom% Cu, were prepared by radio frequency magnetron sputtering on sapphire substrate at diffe......
The radio frequency magnetron sputtering method is used to prepare well-dispersed pyramidal-shaped Ge nanoislands embedd......
The Shenguang-II Upgrade(SG-II Up) facility is an under-construction high-power laser driver with eight beams, 24 kJ ene......
In high-speed cutting, natural thermocouple, artificial thermocouple and infrared radiation temperature measurement are ......
The silicon-rich silica films were prepared by a dual-ion-beam co-sputtering method from a composite Target in an argon ......
The amorphous Ge2Sb2Te5 film with stoichiometric compositions was deposited by co-sputtering of separate Ge, Sb, and Te ......
This paper describes the design and fabrication of superconducting hot electron bolometer (HEB) mixer based on ultra-thi......
Stoichiometric and amorphous Er2O3 films were deposited on Si(001) substrates by radio frequency magnetron technique. Sp......
CrN coatings were deposited on Si(100) and piston rings by ion source assisted 40 kHz magnetron sputtering.Structure and......
Er2O3-Al2O3 film was deposited on the Si(001) substrate by radio frequency magnetron technique at room temperature.The s......
Mo thin films are deposited on soda lime glass (SLG) substrates using DC magnetron sputtering. The Mo film thicknesses a......
Sn/Cu/ZnS precursor were deposited by evaporation on soda lime glass at room temperature,and then polycrystalline thin f......
In this work, TeO_(0.7)thin films were prepared by the reactive magnetron-controlling sputtering method. Complex gray-sc......
The friction, wear and lubrication of carbon nitride coatings on silicon substrates are studied using a spherical diamon......
Sputter-deposited Au/Ni_(50)Fe_(50) bilayer films were annealed in a vacuum of 5×10~(-4) Pa at 523 to 723 K for 30 or 9......
Interface characteristic and mechanical performance of TiAl/Ti2AINb diffusion bonding joint with pur
Solid-state diffusion bonding(DB)of TiAl alloy and Ti2AlNb alloy was carried out using pure Ti as an interlayer at 1000 ......
The thin film of heat-sensitive materials has been widely conced with the current trend of miniaturization and integrati......
Crystalline TiO2 thin films were prepared by DC reactive magnetron sputtering on indium-tin oxide(ITO) thin film deposit......
该文从挂篮荷载计算、施工流程、支座及临时固结施工、挂篮安装及试验、合拢段施工、模板制作安装、钢筋安装、混凝土的浇筑及养生......
In this study, plasma nitriding was used to fabricate a hard protective layer on AISI P20 steel, at three process temper......
Optimization and Evaluation of Sputtering Barrier/Seed Layer in Through Silicon Via for 3-D Integrat
The barrier/seed layer is a key issue in Through Silicon Via(TSV) technology for 3-D integration.Sputtering is an import......
为探究吕家坨井田地质构造格局,根据钻孔勘探资料,采用分形理论和趋势面分析方法,研究了井田7......
This work studies the influence of anisothermal iron sintering process on hollow cathode discharge characteristics. Two ......
In research of YBCO coated conductors, the development of a oxide template for epitaxial growth of YBCO is very importan......
利用包括磁控溅射和热氧化的两步法在Si(111)衬底上制备了Sn掺杂ZnO纳米针.首先用磁控溅射法在Si(111)衬底上制备Sn:Zn薄膜,然后在......
Ternary Zn1-xCdx O alloying films were deposited on silicon substrates by a reactive magnetron sputtering method.The str......
Radiofrequent magnetron sputtering technique was used to produce calcium phosphate coated on the titanium substrates, an......
Characterization of DC magnetron sputtering deposited thin films of TiN for SBN/MgO/TiN/Si structura
Optimal parameters for depositing Titanium nitride (TiN) thin films by DC reactive magnetron sputtering were determined.......
Effect of Post Annealing on the Microstructure and Magnetic Properties of NdFeB/α-Fe/NdFeB Thin Film
A series of nanocomposite thin films, composed of Nd2Fe14B and α-Fe, has been prepared by DC-magnetron sputtering combi......
InP nanoparticles embedded in SiO2 thin films were prepared by radio-frequency magnetron co-sputtering. We analyzed the ......
Amorphous InGaZnO (a-IGZO) films were deposited on the corning eagle XG (EXG) glass substrates using magnetron sputterin......
An ambitious objective in the development of self-lubricating wear-resistant coatings is to make use of lubricious phase......
TiO2 films have been deposited on glass substrates using DC reactive magnetron sputtering at different oxygen partial pr......
