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利用卢瑟福沟道背散射技术结合表面的原子力显微分析,对注He的铝镁尖晶石晶体的晶格损伤及表面形变随退火温度变化的关系进行了研究.结果表明,不同注入剂量的样品中晶格损伤和表面形变表现出显著不同的退火行为.分析认为造成损伤演化的这种差异与注入的He原子在晶体中不同的聚集状态有关.
Using Rutherford trench backscattering combined with atomic force microscopy, the relationship between lattice damage and surface deformation of annealed Al-Mg spinel crystals with annealing temperature was studied. The results show that different injection doses Of the samples show significantly different annealing behavior in terms of lattice damage and surface deformation.The analysis suggests that this difference in damage evolution is related to the different aggregation states of implanted He atoms in the crystal.