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利用扫描电镜，分析了磁控电弧沉积的氨化钛膜微观形貌。实验表明，阴极磁场对膜层的形貌有显著的影响，合理的磁场设计可减少膜层中的宏观颗粒（ＭＰ）；膜的表面形貌主要受ＭＰ的影响，但当基片表面起弧时，弧痕对表面形貌的影响比ＭＰ的影响大；ＭＰ粒径多数在１～３微米之间，但少数的ＭＰ也可能大于十几微米或１微米以下。对ＭＰ的形貌分析表明，ＭＰ的形态与其粒径有关，较小的ＭＰ顶部呈圆球形，而较大的ＭＰ顶部扁平，且底部有微孔。
Using scanning electron microscopy, the micro-topography of titanium nitride films deposited by magnetron arc deposition was analyzed. Experiments show that the magnetic field of the cathode has a significant influence on the morphology of the film. A reasonable design of the magnetic field can reduce the macro-particles (MP) in the film. The surface morphology of the film is mainly affected by the MP. However, , The influence of arc marks on the surface topography is greater than that of MP; most of the MP particle sizes are between 1 and 3 microns, but a few MPs may be more than a dozen or less microns. The morphological analysis of MP showed that the morphology of MP was related to its particle size, the smaller MP was spherical at the top and the larger MP was flat at the top with micropores at the bottom.