论文部分内容阅读
在用射频CVD法沉积碳的实验中,发现有较多量碳巴基洋葱生成.电镜观察表明,该方法只生成碳巴基洋葱,并无碳纳米管等伴随生成,因而制得的巴基洋葱纯度较高。为制取纯净的碳巴基洋葱提供了一种可能的新途径.讨论了射频CVD法中碳巴基洋葱的可能生长机理。认为在等离子作用下使甲烷的部分氢原子解离生成碳氢自由基,在催化剂的作用下,生成的碳烯为了消除碳悬键而卷曲,而碳氢自由基则在表面不断沉积生长而成碳巴基洋葱.
In the experiment of depositing carbon by radio frequency CVD method, a larger amount of carbonbaki onion was found. Electron microscopy observation showed that this method only produced carbonbark onion, and no carbon nanotubes and other accompanying formation, resulting in a higher purity Baki onion. For the preparation of pure carbon Baki onion provides a possible new way. The possible growth mechanism of C Baki onion in RF CVD was discussed. It is thought that under the action of plasma, part of the hydrogen atoms of methane are dissociated to generate hydrocarbon radicals. Under the action of the catalyst, the generated carbenes curl in order to eliminate carbon dangling bonds while the hydrocarbon radicals continuously deposit and grow on the surface C Baki onions.