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The operating pressure of 1.3 × 10-5Pa in the central plane is required in the acceleration chamber of SFC.The.chamber is divided into three sections. Total gas load expected is about 3.9×10-4Pa.l/s. Therefore, totalnecessary pumping speed.amounts to 6.
The operating pressure of 1.3 × 10 -5 Pa in the central plane is required in the acceleration chamber of the SFC. The number is divided into three sections. Total gas load expected is about 3.9 × 10 -4 Pa.l / s. pumping speed.amounts to 6.