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2015年3月20日,国家重大科学仪器设备开发专项“跨尺度微纳米测量仪的开发和应用”项目首次工作会议在上海市计量测试技术研究院举行。“跨尺度微纳米测量仪的开发与应用”项目以我国近年多项创新技术及上海市计测院博士后科研成果为基础,突破我国在微纳米检测技术领域检测方法集成开发的诸多技术瓶颈,旨在攻克宏微联动多轴驱动和多测头集成、基于原子沉积光栅的纳米量值溯
On March 20, 2015, the first major national conference on the development of scientific instruments and equipment and the project “Development and Application of Cross-scale Micro-nano Meters” was held in Shanghai Institute of Measurement and Testing Technology. “Development and Application of Cross-scale Micro and Nano-meter” Based on a number of innovative technologies in China in recent years and the postdoctoral research results of Shanghai Institute of Measurement, this project has broken through many technical bottlenecks that are integrated in the development of micro-nano test technologies in China , Designed to capture macro-micro-linkage multi-axis drive and multi-probe integration, based on the nano-scale atomic deposition grating