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众所周知,在制作器件的工艺过程中,结深的控制对器件成品率的影响较大,如能清晰地显示各种扩散或外延结,甚至是杂质浓度差很大的同型层的纵向结构,无疑将对分析工艺中出现的一些异常现象,如光刻对不正造成P~+N~+相碰,漏源表面反型、基区宽度不合要求等,提供了一种简易的直观方法。以往由于没有一种简易的显结方法,工艺中结的纵向结构一般不作显示。象磨角染色法、滚槽法、电解水氧化法都因样品制备麻烦或显示清晰度欠佳而不被人们所常用,因而在分析一些工艺问题时比较盲目,论据缺乏说服力。我们在工艺
As we all know, in the process of making devices, junction depth control of the device yield greater impact, such as can clearly show a variety of diffusion or epitaxial junction, or even a large difference in the concentration of the same layer of vertical structure, no doubt It will provide a simple and intuitive method for analyzing some abnormal phenomena in the process, such as photolithography, P + N + colliding, source inversion, base width requirement. In the past because there is no simple method of obvious, the longitudinal structure of the knot in the process is generally not shown. As the mill angle dyeing method, roller bathing method, electrolytic water oxidation method are all troublesome due to the trouble of sample preparation or poor display clarity, so they are more blind in the analysis of some technological problems, and the arguments are not convincing. We are in craft