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本文提出了新型电容压力传感器的原理、结构及初步的试验结果。这台试制成的仪表可用于中、低量程的差压测量。一次传感元件是一只由两根充满水银的聚四氟乙烯管组成的U形管压力计。这两根塑料管被分别安装在固定于同一底座上的两只圆筒状十字电容器(组件)的中心腔内,且和它同一个轴线。由于U形管中水银的屏蔽作用,凡施加压力时,两个十字电容器的电容量就发生变化。电容量的变化是用变压器电桥装置中的电感性分压器(IVD)依据标准电容器的值来测量的。本仪表除了具有极高的灵敏度和线性之外,还可获得高级的精度,而且看来还可适用于校准其它类型的差压计。
This paper presents a new capacitive pressure sensor principle, structure and preliminary test results. This test made of the instrument can be used for medium and low range of differential pressure measurement. The primary sensing element is a U-tube manometer consisting of two PTFE tubes filled with mercury. The two plastic tubes are respectively mounted in the central cavity of two cylindrical cross-shaped capacitors (assemblies) fixed on the same base, with the same axis. Due to the shielding effect of the mercury in the U-shaped tube, the capacitance of the two cross-capacitors changes as pressure is applied. The change in capacitance is measured by the value of the standard capacitor using an inductive voltage divider (IVD) in the transformer bridge device. In addition to its extremely high sensitivity and linearity, the instrument offers advanced accuracy and appears to be suitable for calibrating other types of differential pressure gauges.