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气敏半导体薄膜内的载流子浓度与薄膜表面吸附氧密度的关系,可以反映气敏薄膜的敏感性。本文采用刚性能带模型,计算了不同厚度的ZnO薄膜内载流子浓度与表面吸附氧密度的关系,并对结果进行了讨论。计算结果表明,适当选取薄膜的厚度等参数,可以得到高的气敏性。
The relationship between the carrier concentration in the gas-sensitive semiconductor film and the oxygen density adsorbed on the film surface can reflect the sensitivity of the gas-sensing film. In this paper, the rigid band model was used to calculate the relationship between the carrier concentration and the surface oxygen adsorption density of ZnO films with different thicknesses. The results were discussed. The calculation results show that high gas sensitivity can be obtained by properly selecting parameters such as the thickness of the film.