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由于多色发光显示器件的需要,近年来半导体磷化镓绿色发光器件发展迅速,国外普遍采用高压单晶炉拉制体材料,然后在磷化镓体材料衬底上同质外延磷化镓薄膜,再在薄膜上制造绿色发光管的方法。国内由于高压单晶炉尚未成熟,近年来均沿用日本索尼公司一种所谓低压合成溶质扩散法(SSD)、但是,应用该法生长磷化镓速率十分慢,每小时生长0.01～0.1毫米,所得还是多晶体。由此所制成的磷化镓绿色发
Due to the need of multi-color light-emitting display devices, gallium phosphide green light-emitting devices have been rapidly developed in recent years. High-pressure single crystal furnaces are generally used in foreign countries to make bulk materials. Then, homoepitaxial gallium phosphide films on gallium phosphide bulk materials , And then in the film manufacturing green light-emitting tube method. In recent years, Japan has adopted a so-called low-pressure synthetic solute diffusion method (SSD), but the method of growth of gallium phosphide is very slow, growing 0.01 to 0.1 mm per hour, the resulting Or polycrystalline. Made of gallium phosphide green hair