Design and fabrication of a micro electromagnetic vibration energy harvester

• 作 者: 王鹏 李伟 车录锋
• 机 构: State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Tech
• 出 处: 半导体学报
• 发表日期: 2011年10期
• 关键词: magnet resonant fabrication prototype permanent sharply folded acceleration maxi

This paper presents a new micro electromagnetic energy harvester that can convert transverse vibration energy to electrical power.It mainly consists of folded beams,a permanent magnet and copper planar coils.The calculated value of the natural frequency is 274 Hz and electromagnetic simulation shows that the magnetic flux density will decrease sharply with increasing space between the magnet and coils.A prototype has been fabricated using MEMS micromachining technology.The testing results show that at the resonant frequency of 242 Hz,the prototype can generate 0.55μW of maximal output power with peak-peak voltage of 28 m V for 0.5g(g = 9.8 m/s~2) external acceleration.

This paper presents a new micro electromagnetic energy harvester that can convert transverse vibration energy to electrical power. It mainly consists of folded beams, a permanent magnet and copper planar coils. The calculated value of the natural frequency is 274 Hz and electromagnetic simulation shows that the magnetic flux density will decrease sharply with increasing space between the magnet and coils. A prototype has been fabricated using MEMS micromachining technology. testing results show that at the resonant frequency of 242 Hz, the prototype can generate 0.55μW of maximal output power with peak -peak voltage of 28 m V for 0.5 g (g = 9.8 m / s ~ 2) external acceleration.