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利用扫描电镜、X射线衍射和电子背散射衍射研究了CVD自支撑金刚石薄膜的表面形貌组织、织构和晶界分布。研究表明:金刚石薄膜制备气氛纯度较低,造成薄膜中存在较多孪晶。沉积气体中甲烷浓度升高,孪晶发生频率增加,孪晶对织构组分的影响程度增加。高频率孪晶使薄膜中{100}织构转变为{122}织构,但没有观察到明显的{511}和{411}孪晶织构,说明孪晶取向的变化具有一定的选择性。
The surface morphology, texture and grain boundary distribution of CVD self-supporting diamond films were investigated by scanning electron microscopy, X-ray diffraction and electron backscatter diffraction. The results show that the purity of the diamond thin film is relatively low, resulting in more twins in the film. The concentration of methane in the sedimentary gas increases, the frequency of twinning increases, and the influence of twins on the texture components increases. High-frequency twins transform {100} texture to {122} texture in the film, but no clear {511} and {411} twin texture is observed, indicating that there is a certain selectivity for the twin orientation change.