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针对铝合金直接氮化生长AIN过程中的晶体生长过程进行分析,通过X-ray衍射和SEM观察,获得了不同生长阶段AIN晶体的生长特征,研究了铝合金直接氨化生长氮化铝的反应机制.提出了一种气-液-固-固)晶体生长机制,简称VLSS机制,并着重对VLSS机制的实现条件、实现过程以及与传统的VLS晶体生长机制的相同点和差异进行了讨论.
The crystal growth process of AIN during direct nitridation of aluminum alloy was analyzed. The growth characteristics of AIN crystal at different growth stages were obtained by X-ray diffraction and SEM observation. The effects of aluminum nitride direct ammoniation on the growth of aluminum nitride mechanism. A gas-liquid-solid-solid crystal growth mechanism, referred to as the VLSS mechanism, is proposed. The implementation conditions and implementation of the VLSS mechanism and the similarities and differences with the conventional VLS crystal growth mechanism are discussed.