【摘 要】
：
在界面平衡理论基础上,考虑到杂质掺入和蒸发的细致过证,建立了GaAs中掺S、Zn的理论公式。所预言的工艺参数对载流于浓度影响的趋势同实验结果相一致,从而解释了以往文献中所
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在界面平衡理论基础上,考虑到杂质掺入和蒸发的细致过证,建立了GaAs中掺S、Zn的理论公式。所预言的工艺参数对载流于浓度影响的趋势同实验结果相一致,从而解释了以往文献中所不能解释的载流子浓度随三甲基镓(TMG)分压变化的实验现象。在掺杂研究的基础上,生长了GaAs p-n结,获得了良好的单结特性。
Based on the theory of interface equilibrium, a theoretical formula of S and Zn doped GaAs was established considering the detailed evidence of impurity doping and evaporation. The predicted trend of the effect of carrier concentration on carrier concentration is in agreement with the experimental result, which explains the experimental phenomenon that carrier concentration can not be explained by the change of TMG partial pressure in the past. Based on the doping research, the GaAs p-n junction is grown and good single junction characteristics are obtained.
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